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SEMI M38-0312 (Reapproved 0718)
The pressure drops for integral housing/cartridge combination units are determined as a single set of values
the flow curves of the housing and housing/cartridge combination are determined separately
This method is to be used with ANSI/ISAS75
Logging might include only the SECS-II message content
G08200 - SEMI G82 - Specification for 300 mm Load Port for Frame Cassettes in Backend Process StdPbc-1015 SEMI M38-0312 (Reapproved 0718)This Specification defines dimensional requirements for the load port of frame cassette for 300 mm wafer in backend process equipment. It is intended to promote a uniform physical interface between equipment and the factory, to facilitate the use of automated frame cassette transport systems, and or to meet ergonomic requirements for manually loaded equipment. This is a Standard covering equipment for 300 mm frame cassette only. Referenced SEMI
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